SHARP Experiment Plan Form 1 (beta)

Fields marked with an * are required

SHARP Experiment Plan Submission

Examples include: • comparison with other measurements; • defect and defect-repair measurements; • LWR studies; • SMO research; • resolution enhancement techniques; • phase measurement. We ask this so we can recommend ways to get the best data.

Are there any special requirements we should know about? For example, long exposure times, unique pupil fills, alternate NA values, matching the conditions of a previous measurement, etc.?

Experiment Plan Submission Checklist

A graphical description of the measurement targets can be very useful when there is a grid array of test patterns with labels (or not), or when there are recognizable, nearby features that can be used as a reference.